A Damped Decoupled XY Nanopositioning Stage Embedding Graded Local Resonators

Abstract : Lightly damping linear dynamic characteristics of a flexure-based stage mainly limit control bandwidth when its piezo-actuating hysteresis is well compensated. In this paper, a novel damped decoupled XY nanopositioning stage embedding graded local resonators (GLRs) is developed and optimized based on the maximization of motion range and first-order natural frequency. The modal damping strengthening mechanism of local resonant metastructures is analyzed based on the built dynamic model. The GLRs embedded in the working platform has different dynamic parameters, which are optimized based on H2 norm. The motion decoupling is guaranteed by the designed hybrid flexure-guided mechanism while strengthening the Z-direction supporting stiffness. The static/ scanning-frequency dynamic experiment and trajectory tracking control with a PID controller is implemented. The experimental results indicate that maximum motion crosstalk is 0.69\%, and validate the effectiveness of improving the linear dynamics of the stage and expanding control bandwidth.
 EXISTING SYSTEM :
 ? We are using multiple complementary approaches. In one approach the fundamental principles of insect locomotion are applied using existing technologies and in a simplified manner. ? Their motor control is also simplified and the agility of these vehicles makes them suitable for many applications such as amphibious operations and search and rescue. ? We are also developing structurally soft worm-like robots, which crawl via peristaltic waves, for pipe inspection and, when made compact, within the body. ? Robots with a human in the loop for basic control decisions are limited in their movements in complex terrain because of sparse sensory data and limited communications. Some autonomy is essential for their agility.
 DISADVANTAGE :
 ? The majority of these problems involve 108 to 1012 mixed-integer decision variables, where the underlying models are derived from one or more sophisticated Machine Learning techniques, such as regular & logistic regressions, random forest, neural networks, re-enforcement learning, dynamic linear models, recursive least square models, etc. ? Many of these problems include both static and real time aspects of decision making. ? The fourth stage of current development is characterized by a marked hybridization of nonlinear dynamics with other theoretical and application areas, which include control, consideration of also micro/nano, intelligent, or coupled systems, and multiphysics problems.
 PROPOSED SYSTEM :
 • In the proposed presentation the Author will attempt to illustrate the relationship between Design, Manufacture and monitoring towards the end of life recycling of manufactured products based on research work that he has directed over recent years. • As the market and/or industrial interest in virtual environments increase, new technologies and techniques are proposed. • In recent years we have observed a trend on the use of low-cost devices, sometimes taken from the gaming industry in industrial applications. • The same approach can be applied to other automotive learning scenarios, such as design, training and troubleshooting assistance.
 ADVANTAGE :
 ? The SMA actuated system can provide appropriate performance. However, the accuracy of the SMA actuated systems is limited due to the high hysteretic behavior of SMA actuators. ? The flexure hinges are the elastic components in the overall mechanism and have a great influence on the dynamic performance of the XY stage. ? To achieve good dynamic performance, the maximum angular displacement of the working table should remain within ±0.5°(8.7µrad). ? Experiments were carried out to examine the performance of the XY stage with a PID controller which was realized by a Turbo PMAC2 motion control card. ? The stage performance was investigated, and the results show that there are vibrations at 209 and 453 Hz.

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